表面活性剂PEG6000对二元络合体系化学沉积铜的影响
卢建红,邓小梅,阎建辉,涂继国,王明涌,焦树强

Effect of PEG6000 on Electroless Copper in Dual-Ligands System
Jianhong LU,Xiaomei DENG,Jianhui YAN,Jiguo TU,Mingyong WANG,Shuqiang JIAO
表5 不同PEG6000浓度下铜镀层晶粒尺寸和特征衍射峰强度比
Table 5 Intensity ratio of the XRD patterns at different PEG6000 concentration
Concentration of PEG6000/mg·L-1 Crystallite size/nm I (111)/% I (200)/% I (220)/%
20 77.7 36.7 25.9 37.3
25 69.3 34.0 26.4 39.6
30 59.5 32.6 24.0 43.4
35 52.2 31.5 23.2 45.3
40 50.0 27.1 23.9 49.0