表面活性剂PEG6000对二元络合体系化学沉积铜的影响
卢建红1,2,邓小梅3,阎建辉3,涂继国1,王明涌1(
),焦树强1()
),焦树强1()
Effect of PEG6000 on Electroless Copper in Dual-Ligands System
LU Jianhong1,2,DENG Xiaomei3,YAN Jianhui3,TU Jiguo1,WANG Mingyong1(),JIAO Shuqiang1()
),JIAO Shuqiang1()
图6. 不同PEG6000浓度的化学沉积铜的EDS图
Fig.6. EDS micrographs at different PEG6000 concentration (a) 20 mg, (b) 25 mg, (c) 30 mg, (d) 35 mg, (e) 40 mg
