表面活性剂PEG6000对二元络合体系化学沉积铜的影响
卢建红1,2,邓小梅3,阎建辉3,涂继国1,王明涌1(
),焦树强1()
),焦树强1()
Effect of PEG6000 on Electroless Copper in Dual-Ligands System
LU Jianhong1,2,DENG Xiaomei3,YAN Jianhui3,TU Jiguo1,WANG Mingyong1(),JIAO Shuqiang1()
),JIAO Shuqiang1()
图4. PEG6000浓度对沉积速率的影响
Fig.4. Effect of PEG6000 concentration on the copper deposition rate
