表面活性剂PEG6000对二元络合体系化学沉积铜的影响
卢建红1,2,邓小梅3,阎建辉3,涂继国1,王明涌1(
),焦树强1()
),焦树强1()
Effect of PEG6000 on Electroless Copper in Dual-Ligands System
LU Jianhong1,2,DENG Xiaomei3,YAN Jianhui3,TU Jiguo1,WANG Mingyong1(),JIAO Shuqiang1()
),JIAO Shuqiang1()
图1. PEG6000浓度不同时铜电极表面的混合电位-时间曲线
Fig.1. E mix-t curves under different PEG6000 concentration
