氮流量比对磁控溅射(CoCrFeNi)Nx高熵合金薄膜的组织和性能的影响

刘晓东,谈淑咏,霍文燚,张旭海,邵起越,方峰

Effect of Nitrogen Flow Ratio on Microstructure and Property of High-Entropy Alloy Films (CoCrFeNi)Nx Prepared by Magnetron Sputtering

Xiaodong LIU,Shuyong TAN,Wenyi HUO,Xuhai ZHANG,Qiyue SHAO,Feng FANG

表1 氮流量比不同的薄膜的成分

Table 1 Film composition with different nitrogen flow ratio (%, atomic fraction)

Nitrogen flow ratio Co Cr Fe Ni N RN=10% 22.24 20.64 15.65 29.47 11.99 RN=20% 20.11 19.07 14.52 28.11 18.18 RN=30% 18.91 17.90 14.65 26.79 21.75