结构调制超硬Ti/TiN纳米多层膜的制备及其尺寸效应
杨波波,孙珲,杨田林,郑小龙,徐涛,李方正,宋淑梅

Preparation of Structure-Modulated Superhard Ti/TiN Nano-Multilayers and Size Effect
Bobo YANG,Hui SUN,Tianlin YANG,Xiaolong ZHENG,Tao XU,Fangzheng LI,Shumei SONG
表1 Ti/TiN纳米多层膜的薄膜参数
Table 1 Thin film parameters of Ti/TiN multilayer films
Sample No.Ti/TiN single layer deposition time/s

Ti/TiN single layer

thickness/nm

Modulation

period/nm

Number

of periods

Total thickness/μm
1#Ti48/TiN14410.9/28.339.2301.34
2#Ti24/TiN725.4/14.920.3601.35
3#Ti12/TiN363.2/10.013.21201.32
4#Ti9/TiN211.7/5.87.51801.33
5#Ti6/TiN18-5.22401.27