结构调制超硬Ti/TiN纳米多层膜的制备及其尺寸效应
杨波波,孙珲(
),杨田林(),郑小龙,徐涛,李方正,宋淑梅
),杨田林(),郑小龙,徐涛,李方正,宋淑梅
Preparation of Structure-Modulated Superhard Ti/TiN Nano-Multilayers and Size Effect
Bobo YANG,Hui SUN(),Tianlin YANG(),Xiaolong ZHENG,Tao XU,Fangzheng LI,Shumei SONG
),Tianlin YANG(),Xiaolong ZHENG,Tao XU,Fangzheng LI,Shumei SONG
图6. Ti/TiN纳米多层膜的纳米硬度和弹性模量与调制周期的关系
Fig.6. Nano-hardness and elastic modulus of Ti/TiN multilayers
