结构调制超硬Ti/TiN纳米多层膜的制备及其尺寸效应
杨波波,孙珲(
),杨田林(),郑小龙,徐涛,李方正,宋淑梅
),杨田林(),郑小龙,徐涛,李方正,宋淑梅
Preparation of Structure-Modulated Superhard Ti/TiN Nano-Multilayers and Size Effect
Bobo YANG,Hui SUN(),Tianlin YANG(),Xiaolong ZHENG,Tao XU,Fangzheng LI,Shumei SONG
),Tianlin YANG(),Xiaolong ZHENG,Tao XU,Fangzheng LI,Shumei SONG
图3. 单层TiN薄膜和2# Ti/TiN纳米多层膜截面的SEM照片
Fig.3. SEM cross section of singlelayer TiN film (a) and 2# Ti/TiN multilayer films (b)
