结构调制超硬Ti/TiN纳米多层膜的制备及其尺寸效应
杨波波,孙珲(
),杨田林(),郑小龙,徐涛,李方正,宋淑梅
),杨田林(),郑小龙,徐涛,李方正,宋淑梅
Preparation of Structure-Modulated Superhard Ti/TiN Nano-Multilayers and Size Effect
Bobo YANG,Hui SUN(),Tianlin YANG(),Xiaolong ZHENG,Tao XU,Fangzheng LI,Shumei SONG
),Tianlin YANG(),Xiaolong ZHENG,Tao XU,Fangzheng LI,Shumei SONG
图1. 设备结构简图和桶装置功能示意图
Fig.1. Schematic diagram of the equipment (a) and the barrel substrate holder (b)
