树枝状介孔氧化硅磨粒的制备和抛光性能
王婉莹1,陈爱莲2,3,马翔宇1,蔡文杰1,陈杨1(
)
)
Preparation and Polishing Performance of Dendritic Mesoporous Silica Particle Abrasives
WANG Wanying1,CHEN Ailian2,3,MA Xiangyu1,CAI Wenjie1,CHEN Yang1()
)
图6. 表面AFM三维形貌
Fig.6. Three-dimensional AFM images of the surfaces (a) before and (b) after polishing
