树枝状介孔氧化硅磨粒的制备和抛光性能
王婉莹1,陈爱莲2,3,马翔宇1,蔡文杰1,陈杨1()
Preparation and Polishing Performance of Dendritic Mesoporous Silica Particle Abrasives
WANG Wanying1,CHEN Ailian2,3,MA Xiangyu1,CAI Wenjie1,CHEN Yang1()

图5. 表面AFM形貌和截面轮廓曲线

Fig.5. Top-view AFM images and sectional profiles of the surfaces (a, b) before and (c, d) after finishing with DMSPs particle abrasives