用PECVD工艺制备功能装饰氧化硅薄膜的性能

张栋,柯培玲,汪爱英,王香勇,智理

Properties of Functional Decorative Silicon Oxide Films Prepared by PECVD

Dong ZHANG,Peiling KE,Aiying WANG,Xiangyong WANG,Li ZHI

图11 在不同温度制备的阳极薄膜的纳米压痕测试结果

Fig.11 Nanoindentation test results of anode films prepared at different temperatures