用PECVD工艺制备功能装饰氧化硅薄膜的性能

张栋,柯培玲,汪爱英,王香勇,智理

Properties of Functional Decorative Silicon Oxide Films Prepared by PECVD

Dong ZHANG,Peiling KE,Aiying WANG,Xiangyong WANG,Li ZHI

图2 阴极薄膜和阳极薄膜的截面微观形貌

Fig.2 Cross-sectional micro-morphology of cathode films (a, b) and anode films (c, d)