直流磁控溅射非晶碳膜的导电性和耐蚀性

张海峰^1,², 张栋², 李晓伟², 鲁聪达¹, 柯培玲², 汪爱英²

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ZHANG Haifeng^1,², ZHANG Dong², LI Xiaowei², LU Congda¹, KE Peiling², WANG Aiying^2,^**

Schematic illustration of the test for interfacial contact resistance