直流磁控溅射非晶碳膜的导电性和耐蚀性

张海峰^1,², 张栋², 李晓伟², 鲁聪达¹, 柯培玲², 汪爱英²

Electric Conductivity and Corrosion Resistance of Amorphous Carbon Films Prepared by Direct Current Magnetron Sputtering on 304 Stainless Steel

ZHANG Haifeng^1,², ZHANG Dong², LI Xiaowei², LU Congda¹, KE Peiling², WANG Aiying^2,^**

Contact resistance of SS304 and amorphous carbon films with Toray carbon paper under different compaction force