A prerequisite for the application of carbon nanotubes (CNTs) in the industrial sectors of micro- and nano-electronics, it is essential to reduce its contact resistance with metal. Doping Au-nanoparticles can effectively reduce the contact resistance of CNTs. In this paper, a three step process was developed for doping Au-nanoparticles on CNTs, i.e. first, the CNTs are calcinated at high temperature to create defects and hydrophilic groups on their surface, then, the calcinated CNTs are dispersed ultrasonically in chloroauric acid solution to adsorb chloroauric acid, and finally, they are heated in hydrogen atmosphere at high temperature to produce Au-nanoparticles on the surface of CNTs. The produced CNTs are characterized by means of scanning electron microscopy (SEM) X-ray energy dispersive spectroscopy (EDS), X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy. Results show that due to the Au-doping, the G-band peak of Raman spectra of the CNTs shifts to a lower frequency, which indicates that the doping is N-type. N-type dopants transfer electrons to adjacent carbon atoms and increase the electron quantity in CNTs, thereby increasing the electrical conductivity of CNTs. Subsequently, CNTs are assembled into the interval of two Au electrodes by dielectrophoresis (DEP), and the results of real-time measurement by using a precision inductance-capacitance-resistance (LCR) show that the contact resistance between the Au-doped CNTs and Au electrodes has been effectively reduced to ca. half of the original values between the bare CNTs and Au electrodes .